Professor: Electrical Engineering and Computer Science, Nuclear Engineering and Radiological Sciences
California Institute of Technology
PhD Applied Physics ’79
MS Applied Physics, ’77
University of California at Los Angeles
BS Nuclear Engineering (Summa Cum Laude) ’76
BA Astronomy (Summa Cum Laude) ’76
Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas
Applied electromagnetics, MEMS and microsystems, optics and photonics, quantum science and engineering, integrated circuit design and VLSI, plasma science and engineering, energy and power.
AREAS OF SPECIALITY
Computational electromagnetics, microfluidics and gas/chemical, MEMS technology and packaging, optoelectronics, plasma fabrication and plasma-based MEMS devices, plasma materials processing of microelectronics, plasma science and engineering; solid-state energy conversion technologies.
University of Michigan
Ann Arbor, Michigan
Iowa State University
University of Illinois at Urbana-Champaign