Professor

Location

2236 EECS

Group

Computational Plasma Science and Engineering Group

Education

California Institute of Technology

PhD Applied Physics ’79

MS Applied Physics, ’77

University of California at Los Angeles

BS Nuclear Engineering (Summa Cum Laude) ’76

BA Astronomy (Summa Cum Laude) ’76

Research Interests

Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas

RESEARCH AREAS

Applied electromagnetics, MEMS and microsystems, optics and photonics, quantum science and engineering, integrated circuit design and VLSI, plasma science and engineering, energy and power.

AREAS OF SPECIALITY

Computational electromagnetics, microfluidics and gas/chemical, MEMS technology and packaging, optoelectronics, plasma fabrication and plasma-based MEMS devices, plasma materials processing of microelectronics, plasma science and engineering; solid-state energy conversion technologies.

Biography

University of Michigan

Ann Arbor, Michigan

2008-present

• George I Haddad Collegiate Professor, Electrical Engineering & Computer Science Dept.
• Professor, Nuclear Engineering and Radiological Sciences Dept.
• Professor, Applied Physics Program
• Professor, Chemical Engineering
• Director, Michigan Institute for Plasma Science and Engineering
• Director, DOE Center on Control of Plasma Kinetics

Iowa State University

Ames, Iowa

2005-2008

• Dean, College of Engineering
• Melsa Professor of Engineering, Department of Electrical and Computer Engineering

University of Illinois at Urbana-Champaign

• 2005-present Adjunct Faculty, Department of Electrical and Computer Engineering
• 1999-2004 Founder Professor of Engineering
• 1991-2004 Professor, Department of Electrical and Computer Engineering
• 2002-2004 Interim Head of Chemical and Biomolecular Engineering
• 2001 Interim Head of Electrical and Computer Engineering
• 2000 Interim Associate Dean of Administrative Affairs, College of Engineering
• 1994-1995 Assistant Dean of Academic Programs, College of Engineering
• 1988-1991 Associate Professor, Electrical and Computer Engineering
• 1986-1988 Assistant Professor, Electrical and Computer Engineering

Awards

• Charles K. Birdsall Award, Inst. Electrical and Electronic Engineers (IEEE), 2015
• National Academy of Engineering, 2011
• Will Allis Prize for the Study of Ionized Gases, 2010
  American Physical Society
• Medard Welch Award, 2010
  American Vacuum Society
• Alumni Academic Achievement Award, 2009
  UCLA College of Engineering
• University Researcher Award, 2008
  Semiconductor Industry Association
• SRC Student Symposium, Best-in-Session Award; 2005, 2006
• AVS Distinguished Lecturer 2001-2003

• IEEE Plasma Science and Applications Award, 2000
• Institute of Electrical and Electronics Engineers